This name is borne by a Jewish woman in Walter Scott's novel Ivanhoe (1819), as well as the title character (who is deceased and unseen) in Daphne du Maurier's novel Rebecca (1938).
A notable bearer of this name was Marie Antoinette, a queen of France who was executed by guillotine during the French Revolution. Another was Marie Curie (1867-1934), a physicist and chemist who studied radioactivity with her husband Pierre.
In France it is occasionally used as a masculine name in pairings such as Jean-Marie.
This name was fairly common in France, England and the United States in the early 20th century. It became quite popular in France and England at the end of the 20th century, just when it was at a low point in the United States. It quickly climbed the American charts and entered the top ten in 2014.
As an English name, Benjamin came into general use after the Protestant Reformation. A famous bearer was Benjamin Franklin (1706-1790), an American statesman, inventor, scientist and philosopher.